activités

Un panel de compétences pour répondre aux besoins des entreprises

from science to society

Photolithography

UV & electronic lithography

Photolithography mask manufacturing

Deposition of thin and thick layers

Dry etching (ion plasma): RIE, DRIE FIB (Focus Ion Beam) Materials: Silicon (max 6 inches), Glass, Si3N4, LiNbO3,… (max 4

Precision cutting Lapping & polishing Wire bonding Wafer bonding Micro-assembly (flip-chip)

Microscope (MEB, optic, FIB), mechanical profilometer Specific measures : material constraints, optical index, contact angle

Femto Engineering | From science to society
15B avenue des Montboucons, 25030 Besançon Cedex – France

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