activités

Un panel de compétences pour répondre aux besoins des entreprises

from science to society

Deposition

Deposition of thin and thick layers

Deposition of thin and thick layers

PVD, ICPE CVD for metallic deposits (Al, Au, Cr, Ti, Pt, Ni, Cu, …) and oxides (SiO2, TiO2, ZnO, ZrO2 …)
Electrodeposition of thick layers, electroforming (Ni, Cu, Au)

UV & electronic lithography Photolithography mask manufacturing

Dry etching (ion plasma): RIE, DRIE FIB (Focus Ion Beam) Materials: Silicon (max 6 inches), Glass, Si3N4, LiNbO3,… (max 4

Precision cutting Lapping & polishing Wire bonding Wafer bonding Micro-assembly (flip-chip)

Microscope (MEB, optic, FIB), mechanical profilometer Specific measures : material constraints, optical index, contact angle

Femto Engineering | From science to society
15B avenue des Montboucons, 25030 Besançon Cedex – France

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