Microfabrication in clean room facilities

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A nationally ranked micro- and nanofabrication plant

With its 1400 m2 of cleanroom area, the MIMENTO (microfabrication for mechanics, nanosciences, thermics and optics) installations make its high-technology equipment available to both industry and to academics.

R & D studies are thus possible in micro-mechanics, micro-nano-optics and micro-nano-acoustics leading to the design and production of MEMS, MOEMS and NEMS devices.

The technological installations are equipped with a pilot line for industrial microfabrication (SAW/BAW and RF-MEMS components). The line is available for orders for prototypes, pre-production and development for numerous materials (silicium, quartz, niobate, etc.).

The BTR network

Since 2004 the MIMENTO installations have been a part of the national network of large technological facilities for basic technological research, the Renatech network supported by the BTR program.

Biomedical

Design and fabrication of biochips :

  • Design of plasmonic chips
  • Analysis of biological interactions on biochip

Specific clean room technologies

Single-crystal thin film on multi-functional hybrid wafers

Markets

  • telecommunications
  • automotive industry
  • biomedical industry
  • watchmaking

Florent BASSIGNOT

Contact

Florent BASSIGNOT
Microfabrication Engineer
FEMTO Engineering
15B, avenue des Montboucons - F-25030 BESANÇON
Phone +33 (0)3 81 66 55 83
florent.bassignot@femto-st.fr

Rabah ZEGGARI

Contact Biomedical

Rabah ZEGGARI, PhD
Micro & Nanotechnology Engineer
BioMEMS & NEMS
FEMTO Engineering
15B, avenue des Montboucons
F-25030 BESANÇON CEDEX
Phone +33 (0)3 63 08 24 82 - Fax (0)3 81 66 67 01
rabah.zeggari@femto-st.fr